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Scanning Probe Lithography - Microsystems Hyongsok T. Soh Softcover reprint of hardcover 1st ed. 2001 edition
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Scanning Probe Lithography - Microsystems
Hyongsok T. Soh
Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample.
220 pages, 193 black & white illustrations, biography
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 2010年12月8日 |
| ISBN13 | 9781441948946 |
| 出版社 | Springer-Verlag New York Inc. |
| ページ数 | 197 |
| 寸法 | 155 × 235 × 12 mm · 317 g |
| 言語 | 英語 |
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