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Introductory MEMS: Fabrication and Applications Thomas M. Adams 2010 edition
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Introductory MEMS: Fabrication and Applications
Thomas M. Adams
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.
444 pages, 20 black & white tables, biography
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 2014年9月7日 |
| ISBN13 | 9781489984210 |
| 出版社 | Springer-Verlag New York Inc. |
| ページ数 | 440 |
| 寸法 | 234 × 155 × 27 mm · 696 g |
| 言語 | 英語 |
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