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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications - Topics in Applied Physics Rainer Behrisch Softcover reprint of the original 1st ed. 1991 edition
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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications - Topics in Applied Physics
Rainer Behrisch
Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering.
430 pages, 66 black & white illustrations, 6 black & white tables, biography
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 2014年8月23日 |
| 発売日 | 2013 |
| ISBN13 | 9783662311042 |
| 出版社 | Springer-Verlag Berlin and Heidelberg Gm |
| ページ数 | 415 |
| 寸法 | 155 × 235 × 23 mm · 607 g |
| 言語 | ドイツ語 |
| 編集者 | Behrisch, Rainer |
| 編集者 | Wittmaack, Klaus |
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