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Low Pressure Plasmas and Microstructuring Technology Gerhard Franz 2009 edition
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¥ 37.640
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発送予定日 年8月28日 - 年9月15日
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Low Pressure Plasmas and Microstructuring Technology
Gerhard Franz
Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.
732 pages, 1, black & white illustrations
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 2009年4月30日 |
| ISBN13 | 9783540858485 |
| 出版社 | Springer-Verlag Berlin and Heidelberg Gm |
| ページ数 | 732 |
| 寸法 | 155 × 235 × 39 mm · 1,23 kg |
| 言語 | 英語 |
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