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Piezoelectric MEMS Resonators - Microsystems and Nanosystems Softcover reprint of the original 1st ed. 2017 edition
Piezoelectric MEMS Resonators - Microsystems and Nanosystems
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS.
424 pages, 121 Tables, color; 127 Illustrations, color; 104 Illustrations, black and white; XII, 424
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 2018年7月12日 |
| ISBN13 | 9783319804057 |
| 出版社 | Springer International Publishing AG |
| ページ数 | 424 |
| 寸法 | 150 × 220 × 10 mm · 607 g |
| 言語 | ドイツ語 |
| 編集者 | Bhugra, Harmeet |
| 編集者 | Piazza, Gianluca |