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Piezoelectric MEMS Resonators - Microsystems and Nanosystems 1st ed. 2017 edition
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Piezoelectric MEMS Resonators - Microsystems and Nanosystems
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS.
300 pages, 200 black & white illustrations, biography
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 2017年1月18日 |
| ISBN13 | 9783319286860 |
| 出版社 | Springer International Publishing AG |
| ページ数 | 424 |
| 寸法 | 246 × 166 × 30 mm · 766 g |
| 言語 | フランス語 |
| 編集者 | Bhugra, Harmeet |
| 編集者 | Piazza, Gianluca |
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