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Nanopositioning Technologies: Fundamentals and Applications Softcover reprint of the original 1st ed. 2016 edition
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Nanopositioning Technologies: Fundamentals and Applications
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning.
409 pages, 203 Illustrations, color; 76 Illustrations, black and white; VI, 409 p. 279 illus., 203 i
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 2018年3月30日 |
| ISBN13 | 9783319795393 |
| 出版社 | Springer International Publishing AG |
| ページ数 | 409 |
| 寸法 | 150 × 220 × 10 mm · 580 g |
| 言語 | ドイツ語 |
| 編集者 | Liu, Xinyu |
| 編集者 | Ru, Changhai |
| 編集者 | Sun, Yu |
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