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Nanopositioning Technologies: Fundamentals and Applications 1st ed. 2016 edition
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Nanopositioning Technologies: Fundamentals and Applications
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning.
409 pages, 76 black & white illustrations, 203 colour illustrations, biography
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 2016年1月7日 |
| 発売日 | 2015 |
| ISBN13 | 9783319238524 |
| 出版社 | Springer International Publishing AG |
| ページ数 | 409 |
| 寸法 | 155 × 235 × 24 mm · 757 g |
| 言語 | フランス語 |
| 編集者 | Liu, Xinyu |
| 編集者 | Ru, Changhai |
| 編集者 | Sun, Yu |
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