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Design for Manufacturability with Advanced Lithography Bei Yu Softcover reprint of the original 1st ed. 2016 edition
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発送予定日 年9月14日 - 年9月24日
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Design for Manufacturability with Advanced Lithography
Bei Yu
This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).
164 pages, 35 Tables, black and white; XI, 164 p.
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 2016年8月23日 |
| ISBN13 | 9783319373935 |
| 出版社 | Springer International Publishing AG |
| ページ数 | 164 |
| 寸法 | 150 × 220 × 10 mm · 258 g |
| 言語 | ドイツ語 |
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