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Design for Manufacturability with Advanced Lithography Bei Yu 1st ed. 2016 edition
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発送予定日 年9月22日 - 年10月2日
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Design for Manufacturability with Advanced Lithography
Bei Yu
This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).
164 pages, 9 black & white illustrations, 91 colour illustrations, 35 black & white tables, biograph
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 2015年11月23日 |
| ISBN13 | 9783319203843 |
| 出版社 | Springer International Publishing AG |
| ページ数 | 164 |
| 寸法 | 155 × 235 × 11 mm · 426 g |
| 言語 | フランス語 |
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