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Plasma Charging Damage Kin P. Cheung 2001 edition
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Plasma Charging Damage
Kin P. Cheung
In the 50 years since the invention of transistor, silicon integrated circuit (IC) technology has made astonishing advances. In state of the art silicon Ie manufacturing process, plasma is used in more than 20 different critical steps.
346 pages, biography
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 2000年10月4日 |
| ISBN13 | 9781852331443 |
| 出版社 | Springer London Ltd |
| ページ数 | 346 |
| 寸法 | 155 × 235 × 20 mm · 657 g |
| 言語 | 英語 |
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