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Glow-discharge Hydrogenated Amorphous Silicon - Advances in Solid State Technology (Closed) K. Tanaka 1990 edition
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Glow-discharge Hydrogenated Amorphous Silicon - Advances in Solid State Technology (Closed)
K. Tanaka
A graduate-level description of recent Japanese research on the chemistry of amorphous silicon film deposition associated with plasma CVD, a step in producing amorphous semiconductors. Reports on studies (of microscopic processes of gas-phase reaction as well as chemical reactions on the film growin
277 pages, biography
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 1989年11月30日 |
| ISBN13 | 9780792303091 |
| 出版社 | Kluwer Academic Publishers |
| ページ数 | 277 |
| 寸法 | 156 × 234 × 17 mm · 585 g |
| 言語 | 英語 |
| 編集者 | Tanaka, Kazuyoshi |
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