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Rapid Thermal Processing of Semiconductors - Microdevices Victor E. Borisenko 1997 edition
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Rapid Thermal Processing of Semiconductors - Microdevices
Victor E. Borisenko
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions.
358 pages, biography
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 1997年5月31日 |
| ISBN13 | 9780306450549 |
| 出版社 | Springer Science+Business Media |
| ページ数 | 358 |
| 寸法 | 178 × 254 × 26 mm · 870 g |
| 言語 | 英語 |
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