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Nanotechnology: Integrated Processing Systems for Ultra-precision and Ultra-fine Products Taniguchi
Nanotechnology: Integrated Processing Systems for Ultra-precision and Ultra-fine Products
Taniguchi
The manufacture of integrated circuits and opto-electronic devices, for example, calls for accuracies in the nanometre range (approximately three atomic lattice spacings). This book examines the technology and systems needed to achieve this level of accuracy. It is written by the leading researchers in Japan, that is: the world leaders.
406 pages, halftones, numerous line figures, tables
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 1996年7月25日 |
| ISBN13 | 9780198562832 |
| 出版社 | Oxford University Press |
| ページ数 | 422 |
| 寸法 | 194 × 253 × 27 mm · 1,01 kg |
| 編集者 | Taniguchi, Norio (Professor Emeritus, Professor Emeritus, Tokyo Science University) |
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