III-V Integrated Circuit Fabrication Technology 第1 版

GaAs processing has reached a mature stage. New semiconductor compounds are emerging that will dominate future materials and device research, although the processing techniques used for GaAs will still remain relevant. This book covers all aspects of the current state of the art of III?V processing, with emphasis on HBTs. It is aimed at practicing engineers and graduate students and engineers new to the field of III?V semiconductor IC processing. The book?s primary purpose is to discuss all aspects of processing of active and passive devices, from crystal growth to backside processing, including lithography, etching, and film deposition.