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Defects and Properties of Semiconductors: Defect Engineering - Advances in Solid State Technology J Chikawa Softcover reprint of the original 1st ed. 1987 edition
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Defects and Properties of Semiconductors: Defect Engineering - Advances in Solid State Technology
J Chikawa
Defect study in semiconductor engineering started originally with seeking methods how to suppress generation of harmful defects during device processing in order to achieve a high yield of device fabrication.
272 pages, black & white illustrations
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 2011年12月25日 |
| ISBN13 | 9789401086165 |
| 出版社 | Springer |
| ページ数 | 300 |
| 寸法 | 152 × 229 × 14 mm · 367 g |
| 編集者 | Chikawa, J. |
| 編集者 | Sumino, K. |
| 編集者 | Wada, K. |
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