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Nanoimprint Lithography: An Enabling Process for Nanofabrication Weimin Zhou Softcover Reprint of the Original 1st 2013 edition
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Nanoimprint Lithography: An Enabling Process for Nanofabrication
Weimin Zhou
Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes.
249 pages, XIII, 249 p.
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 2016年8月23日 |
| ISBN13 | 9783662510865 |
| 出版社 | Springer-Verlag Berlin and Heidelberg Gm |
| ページ数 | 249 |
| 寸法 | 156 × 233 × 18 mm · 416 g |
| 言語 | 英語 |
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