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Mikromechanik: Mikrofertigung Mit Methoden Der Halbleitertechnologie Anton Heuberger
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Mikromechanik: Mikrofertigung Mit Methoden Der Halbleitertechnologie
Anton Heuberger
501 pages, black & white illustrations, bibliography
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 2012年6月14日 |
| ISBN13 | 9783642466229 |
| 出版社 | Springer-Verlag Berlin and Heidelberg Gm |
| ページ数 | 501 |
| 寸法 | 170 × 244 × 27 mm · 825 g |
| 言語 | ドイツ語 |
| 編集者 | Heuberger, Anton |
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