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Reactive Sputter Deposition - Springer Series in Materials Science Softcover reprint of hardcover 1st ed. 2008 edition
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Reactive Sputter Deposition - Springer Series in Materials Science
In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process.
590 pages, 336 black & white illustrations, 5 colour illustrations, 37 black & white tables
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 2010年11月25日 |
| ISBN13 | 9783642095368 |
| 出版社 | Springer-Verlag Berlin and Heidelberg Gm |
| ページ数 | 572 |
| 寸法 | 155 × 235 × 31 mm · 885 g |
| 言語 | ドイツ語 |
| 編集者 | Depla, Diederik |
| 編集者 | Mahieu, Stijn |
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