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Modelling of Microfabrication Systems - Microtechnology and MEMS Raja Nassar Softcover reprint of hardcover 1st ed. 2003 edition
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Modelling of Microfabrication Systems - Microtechnology and MEMS
Raja Nassar
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
279 pages, 4 black & white illustrations, biography
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 2010年12月8日 |
| ISBN13 | 9783642055362 |
| 出版社 | Springer-Verlag Berlin and Heidelberg Gm |
| ページ数 | 270 |
| 寸法 | 155 × 235 × 14 mm · 394 g |
| 言語 | ドイツ語 |
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