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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology Seongbo Shim 2018 Edition
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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology
Seongbo Shim
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.
138 pages, 40 Tables, color; 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p.
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 2018年4月3日 |
| ISBN13 | 9783319762937 |
| 出版社 | Springer International Publishing AG |
| ページ数 | 138 |
| 寸法 | 150 × 220 × 20 mm · 394 g |
| 言語 | ドイツ語 |
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