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Ellipsometry for Industrial Applications Karl Riedling Softcover reprint of the original 1st ed. 1988 edition
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Ellipsometry for Industrial Applications
Karl Riedling
During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available.
112 pages, 49 black & white illustrations
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 1987年12月14日 |
| ISBN13 | 9783211820407 |
| 出版社 | Springer Verlag GmbH |
| ページ数 | 99 |
| 寸法 | 170 × 244 × 6 mm · 195 g |
| 言語 | 英語 |
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