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Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems Michael Huff 2020 edition
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Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems
Michael Huff
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps.
521 pages, 24 Illustrations, color; 212 Illustrations, black and white; XIX, 521 p. 236 illus., 24 i
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 2020年4月10日 |
| ISBN13 | 9783030405588 |
| 出版社 | Springer Nature Switzerland AG |
| ページ数 | 521 |
| 寸法 | 150 × 220 × 20 mm · 934 g |
| 言語 | ドイツ語 |
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