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Mechanical Properties of Silicon Based Compounds: Silicides - Engineering Materials Joshua Pelleg 2019 edition
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Mechanical Properties of Silicon Based Compounds: Silicides - Engineering Materials
Joshua Pelleg
This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. A special chapter is given on deformation in silicides in the nano scale.
274 pages, 10 Tables, color; 12 Illustrations, color; 303 Illustrations, black and white; XVI, 274 p
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 2020年8月14日 |
| ISBN13 | 9783030226008 |
| 出版社 | Springer Nature Switzerland AG |
| ページ数 | 274 |
| 寸法 | 150 × 220 × 10 mm · 454 g |
| 言語 | ドイツ語 |
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