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Simulation of Deposition Processes with PECVD Apparatus Juergen Geiser
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Simulation of Deposition Processes with PECVD Apparatus
Juergen Geiser
Discusses the study of simulating the growth of a thin film by chemical vapour deposition (CVD) processes. This title presents underlying hierarchy of models for low-temperature and low-pressure plasma in order to discuss the processes that can be used to implant or deposit thin layers of important materials.
144 pages, Illustrations
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 2012 |
| ISBN13 | 9781621003656 |
| 出版社 | Nova Science Publishers Inc |
| ページ数 | 144 |
| 寸法 | 162 × 234 × 14 mm · 352 g |
![Cover for Juergen Geiser · Multicomponent and Multiscale Systems: Theory, Methods, and Applications in Engineering (Hardcover Book) [1st ed. 2016 Edition] (2015)](https://imusic.b-cdn.net/images/item/original/168/9783319151168.jpg?juergen-geiser-2015-multicomponent-and-multiscale-systems-theory-methods-and-applications-in-engineering-hardcover-book&class=scaled&v=1560854280)
