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Materials and Failures in MEMS and NEMS A Tiwari
Materials and Failures in MEMS and NEMS
A Tiwari
The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process.
432 pages
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 2015年10月5日 |
| ISBN13 | 9781119083603 |
| 出版社 | John Wiley & Sons Inc |
| ページ数 | 432 |
| 寸法 | 185 × 262 × 28 mm · 934 g |
| 編集者 | Raj, Baldev |
| 編集者 | Tiwari, Atul |
