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Doping Engineering for Front-End Processing: Volume 1070 - MRS Proceedings B J Pawlak
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Doping Engineering for Front-End Processing: Volume 1070 - MRS Proceedings
B J Pawlak
The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.
336 pages, black & white illustrations
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 2014年6月5日 |
| ISBN13 | 9781107408548 |
| 出版社 | Cambridge University Press |
| ページ数 | 336 |
| 寸法 | 152 × 229 × 18 mm · 533 g (重量（概算）) |
| 言語 | 英語 |
| 編集者 | Law, M. (University of Florida) |
| 編集者 | Pawlak, B. J. |
| 編集者 | Pelaz, M. L. (Universidad de Valladolid, Spain) |
| 編集者 | Surugo, K. |
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