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Computational Modeling in Semiconductor M. Meyyappan
Computational Modeling in Semiconductor
M. Meyyappan
Provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition and plasma processing, as well as defining the basic principles of transport phenomena.
390 pages, 120 illustrations
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 1995 |
| 発売日 | 1994 |
| ISBN13 | 9780890067079 |
| 出版社 | Artech House |
| ページ数 | 390 |
| 寸法 | 159 × 229 × 25 mm · 657 g |
| 編集者 | Meyyappan, M. |
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