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An Introduction to Microelectromechanical Systems Engineering Nadim Maluf First Printing edition
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An Introduction to Microelectromechanical Systems Engineering
Nadim Maluf
Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS-including silicon, polymers, and glass and quartz substrates-as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications. DLC: Microelectromechanical systems.
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 1999年11月30日 |
| ISBN13 | 9780890065815 |
| 出版社 | Artech House Print on Demand |
| ページ数 | 265 |
| 寸法 | 158 × 24 × 232 mm · 644 g |
| 言語 | 英語 |
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