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Particle Control for Semiconductor Manufacturing R.P. Donovan 第1 版
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Particle Control for Semiconductor Manufacturing
R.P. Donovan
There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In
480 pages
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 1990年1月26日 |
| ISBN13 | 9780824782429 |
| 出版社 | Taylor & Francis Inc |
| ページ数 | 480 |
| 寸法 | 150 × 220 × 20 mm · 1,09 kg |
| 言語 | 英語 |
