Spectroscopic Ellipsometry: Principles and Applications - Fujiwara, Hiroyuki (National Institute of Advanced Industrial Science & Technology, Tsukuba, Japan) - Books - John Wiley & Sons Inc - 9780470016084 - January 26, 2007
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Spectroscopic Ellipsometry: Principles and Applications

Fujiwara, Hiroyuki (National Institute of Advanced Industrial Science & Technology, Tsukuba, Japan)

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Spectroscopic Ellipsometry: Principles and Applications

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE).

388 pages, Illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released January 26, 2007
ISBN13 9780470016084
Publishers John Wiley & Sons Inc
Pages 392
Dimensions 157 × 235 × 26 mm   ·   762 g
Language English  

See all of Fujiwara, Hiroyuki (National Institute of Advanced Industrial Science & Technology, Tsukuba, Japan) ( e.g. Hardcover Book )