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Microelectromechanical Systems: Advanced Materials and Fabrication Methods National Research Council
Microelectromechanical Systems: Advanced Materials and Fabrication Methods
National Research Council
Microelectromenchanical systems (MEMS) is a field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. MEMS is a multidisciplinary field involving challenges and opportunities for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry.
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 1997年12月1日 |
| ISBN13 | 9780309059800 |
| 出版社 | National Academies Press |
| ページ数 | 76 |
| 寸法 | 216 × 279 × 25 mm · 301 g |
| 言語 | 英語 |
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