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Database Needs for Modeling and Simulation of Plasma Processing National Research Council
Database Needs for Modeling and Simulation of Plasma Processing
National Research Council
In spite of its high cost and technical importance, plasma equipment is still largely designed empirically, with little help from computer simulation.
74 pages
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 1996年10月21日 |
| ISBN13 | 9780309055918 |
| 出版社 | National Academies Press |
| ページ数 | 74 |
| 寸法 | 216 × 279 × 25 mm · 234 g |
| 言語 | 英語 |
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