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Beam Technologies for Integrated Processing National Research Council
Beam Technologies for Integrated Processing
National Research Council
Beam technologies play an important role in microelectronic component fabrication. This volume identifies various beam technologies and their applications in electronics and other manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 1992 |
| ISBN13 | 9780309046350 |
| 出版社 | National Academies Press |
| ページ数 | 106 |
| 寸法 | 216 × 279 × 25 mm · 310 g |
| 言語 | 英語 |
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