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Lecture Notes on Principles of Plasma Processing Francis F. Chen 2003 edition
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Lecture Notes on Principles of Plasma Processing
Francis F. Chen
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. This title introduces basic plasma concepts to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas.
219 pages, 177 black & white illustrations, biography
| メディア | 書籍 Book |
| リリース済み | 2003年1月31日 |
| ISBN13 | 9780306474972 |
| 出版社 | Springer Science+Business Media |
| ページ数 | 219 |
| 寸法 | 213 × 278 × 12 mm · 517 g |
| 言語 | 英語 |
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