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The Physics of Submicron Lithography - Microdevices Kamil A. Valiev 1992 Edition
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発送予定日 年12月7日 - 年12月17日
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The Physics of Submicron Lithography - Microdevices
Kamil A. Valiev
In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer.
493 pages, biography
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 1992年3月31日 |
| ISBN13 | 9780306435782 |
| 出版社 | Springer Science+Business Media |
| ページ数 | 493 |
| 寸法 | 178 × 254 × 25 mm · 1,09 kg |
| 言語 | 英語 |
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