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Fabrication Engineering at the Micro- and Nanoscale - The Oxford Series in Electrical and Computer Engineering Stephen A. Campbell 4 Revised edition
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Fabrication Engineering at the Micro- and Nanoscale - The Oxford Series in Electrical and Computer Engineering
Stephen A. Campbell
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.
688 pages, black & white illustrations, black & white tables, figures
| メディア | 書籍 Paperback Book (ソフトカバーで背表紙を接着した本) |
| リリース済み | 2012年11月15日 |
| ISBN13 | 9780199861224 |
| 出版社 | Oxford University Press Inc |
| ページ数 | 688 |
| 寸法 | 236 × 192 × 26 mm · 1,08 kg |
| 言語 | 英語 |
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