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Interlayer Dielectrics for Semiconductor Technologies Shyam Muraka
Interlayer Dielectrics for Semiconductor Technologies
Shyam Muraka
Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. This work covers the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation. It brings together the science and technology of interlayer dielectrics materials.
464 pages, Approx. 200 illustrations; Illustrations, unspecified
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 2003年12月30日 |
| ISBN13 | 9780125112215 |
| 出版社 | Elsevier Science Publishing Co Inc |
| ページ数 | 464 |
| 寸法 | 165 × 240 × 25 mm · 1,01 kg |
| 編集者 | Eizenberg, Moshe |
| 編集者 | Murarka, Shyam P |
| 編集者 | Sinha, Ashok K |
