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Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies Badih El-Kareh 2009 edition
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Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies
Badih El-Kareh
Compiled from industrial and academic lecture notes and reflecting years of experience in the development of silicon devices, this book covers both their theoretical and practical aspects, and how their electrical properties and processing conditions interact.
598 pages, 17 black & white tables, biography
| メディア | 書籍 Hardcover Book (ハードカバー付きの本) |
| リリース済み | 2009年1月12日 |
| ISBN13 | 9780387367989 |
| 出版社 | Springer-Verlag New York Inc. |
| ページ数 | 598 |
| 寸法 | 155 × 235 × 33 mm · 1,04 kg |
| 言語 | 英語 |
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